Concept information
Preferred term
Elektronolitografia
Broader concept
Entry terms
- E-beam lithography
- EBL
- Electron-beam lithography
In other languages
-
Electron beam lithography
English
-
Lithographie à faisceau d'électrons
French
-
Elektronenstrahllithografie
German
-
електронна літографія
Ukrainian
URI
https://bn-skos.lab.dariah.pl/Elektronolitografia
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