Concept information
There is no term for this concept in this language.
Preferred term
Elektronolitografia (pl)
Broader concept
Entry terms
- Electron beam lithography
In other languages
-
Lithographie à faisceau d'électrons
French
-
Elektronenstrahllithografie
German
-
Polish
-
E-beam lithography
-
EBL
-
Electron-beam lithography
-
електронна літографія
Ukrainian
URI
https://bn-skos.lab.dariah.pl/Elektronolitografia
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