Concept information
Preferred term
Fotolitografia
Broader concept
Entry terms
- Litografia optyczna
- Optical lithography
- Photolithography
- UV lithography
In other languages
-
photolithography
English
-
photolithographie
French
-
Fotolithografie
German
-
Фотолітографія
Ukrainian
URI
https://bn-skos.lab.dariah.pl/Fotolitografia
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